The Journal of Scanning Microscopies
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SCANNING Vol. 19, 300–309 (1997)
© FAMS, Inc.
Received November 27, 1996
Accepted with revision January 15, 1997
The Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), Electrical Engineering Department, National University of Singapore, Singapore
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Mesh generation is an integral part of the finite element simulation of electron guns. This paper shows that curvilinear meshes are the ideal type of mesh to use, both in terms of accuracy and speed of computation, and presents a numerical method to generate quasi-curvilinear meshes for a wide variety of electron gun structures.
Key words: finite element, mesh generation, electron gun simulation, ray tracing, space charge distribution
Address for reprints:
The Centre for Integrated Circuit Failure Analysis and Reliability
Electrical Engineering Department
National University of Singapore
10 Kent Ridge Crescent