The Journal of Scanning Microscopies
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SCANNING Vol. 19, 264–268 (1997)
© FAMS, Inc.
Received August 15, 1996
Accepted September 25, 1996
D. Knebel, M. Amrein, K. Voigt,* R. Reichelt
Institut für Medizinische Physik und Biophysik, Westfälische Wilhelms-Universität, Münster; *marco GmbH, Hermsdorf, Germany
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In scanning probe microscopy (SPM), the image acquisition time is usually very long because of the limited speed with which the scanning device can trace the topography of the specimen under feed-back control. This limitation is often brought about by the natural frequency of the scanner in the direction perpendicular to the sample plane that confines the usable bandwidth of the feed-back loop. In this paper, we present a piezo-ceramic scanner that provides a large scan range and at the same time allows for adjustment of the probe-to-sample distance faster by about one order of a magnitude than a conventional setup. This is achieved through the combination of a large single tube scanner that provides a high-scan range and a small piezo element for swift motion in the direction perpendicular to the sample plane. The natural frequency in this direction lies at about 275 kHz. We outline the design considerations to avoid disturbing excitation of the scanner through the fast piezo element.
Key words: scanning probe microscopy, scan speed, piezo, rapid scan unit
This work was supported by the Deutsche Forschungsgemeinschaft (DFG) (Grant No. Re 782/2-2 to R.R. and M.A.).
Address for reprints:
Institut für Medizinische Physik und Biophysik
Westfälische Wilhelms-Universität Münster
48149 Münster, Germany